Remote control and Remote Data collection are playing
increasingly important roles in the achievement of cost-effective, high uptime operation of semiconductor
equipment. Hitachi has developed a system
for the monitoring and control of multiple CD-SEM tool
clusters, from a location outside of the clean room. This
system reduces the requirement to enter the clean area
for routine operation and maintenance functions.
The Hitachi CD-SEM Remote Control System, CDRECS,
is a second-generation system that will revolutionize the
way that semiconductor production tools are monitored,
managed and serviced. The CDRECS System provides
a real time control interface to a CD-SEM from a remote
location outside of the FAB. Operators can monitor or
operate the CD tool from an external location without
the need to “suit up”.
CDRECS is able to monitor the operational status of a
cluster of up to 10 CD tools from a single Command
Center. An alarm can be sent to the Command Center
Console as soon as it occurs, notifying equipment support
personnel and directing them to the tool with the problem.
The appropriate corrective action can be initiated from
the external location reducing the requirement to cross
the clean room barrier.
Technology
The system is comprised of three main component
technologies:
The Universal Interface BOX (UIB) provides a local and
remote control interface from the CD tool to the
CDRECS Digital Exchange Box (DEB).
The DEB utilizes a proprietary CAT5E cable connection
to each UIB. The DEB can be installed up to 150 meters
from the tool cluster. Ideally, the DEB can be located in
an existing electrical or telecommunications room. The
CDRECS DEB is then connected to the Command
Center hardware using Fiber Optic cable.
The Command Center can be located up to 1000 meters
from the DEB.
The Command Center is comprised of 2 LCD monitors,
a keyboard and a mouse. A dedicated PC running
Microsoft Windows XP Professional software and the
tool notification and management software controls the
Command Center.
One monitor is used to display the status of each CD
tool. This monitor provides a focal point for the status of
all tools connected to the Hitachi CD-SEM Remote
Control System.
The second monitor, keyboard, and mouse allow the
user to select from a list of tools connected to the
Hitachi CD-SEM Remote Control System. Once the
CD tool is selected the Graphical User Interface (GUI)
of the selected tool will be displayed on the LCD monitor.
Full control, of the selected tool, is now available to the
operator at the Command Center. This includes loading
a recipe, running the wafer, and any other operation that
would normally be performed at the CD tool operator
interface. On-board tool diagnostics can be initiated
from the Command Center.
Return on Investment ( ROI )
The CDRECS system provides a cost effective solution to the problem of controlling multiple CD tools from outside
of the clean room. The CDRECS system duplicates the user interface and allows full operation of the CD tool from
an external location. In addition the architecture of the system has been designed to minimize the security concerns
involved in handling confidential data.
The CDRECS system provides a rapid return on investment (ROI ) in months rather than years.
