I-5320 E-Beam Wafer Inspection System
I-5320
  • High sensitivity detection of open failures
  • Variable beam energy for detecting wide variety of process defects
  • Hybrid inspection mode of die-to-die and cell-to-cell
  • High efficiency DDI mode for in-line process monitoring



Hitachi High-Technologies Canada, Inc.
89 Galaxy Blvd. Suite 14,
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