IS-2700 Patterned Wafer Inspection System
IS-2700
  • High sensitivity of 0.1µm (at high sensitivity mode)
  • High throughput of 60 wph (at high throughput mode)
  • Ease of use

System Specifications

Wafer Size
300mm / 200mm
Sensitivity*
0.10µm - high sensitivity mode
0.15µm - high throughput mode
Throughput
25 wph (300mm) / 45 wph (200mm) - high sensitivity mode
37 wph (300mm) / 60 wph (200mm) - high throughput mode
Function
Built-in UV review, DFC (option)
Interface
Ethernet (FTP), SECS, GEM



Hitachi High-Technologies Canada, Inc.
89 Galaxy Blvd. Suite 14,
Toronto, Ontario, Canada, M9W 6A4
Tel: 416.675.5860 | Fax: 416.675.0061 | Email
Designed By: MOTIF DESIGN
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