Features

1. A new objective lens design with "Super ExB Filter" technology. Using a single detector, the Super ExB Filter collects and separates the various components of pure SE, compositional SE and BSE electron signals.
   
   
2. A guaranteed resolution of 2.0 nm at 1kV for low voltage applications. All performance specifications are guaranteed at customer's facilities.
   
   
3. A choice of specimen stage: Type I for small sample applications with 50mm x 50mm stage movement or type II for large sample applications with 110mm x 110mm stage movement and computer controlled 5 axes motorization with graphical interface software.
   
   
4. Advanced dry vacuum system design including Turbo Molecular Pump (TMP).
   
   
5. A new GUI design developed in consultation with users make the S-4800 the most advanced, user friendly SEM available today.
   

Specifications

Secondary electron image resolution 1.0 nm (at 15 kV) 2.0 nm (at 1 kV) Backscattered electron image resolution 3.0 nm guaranteed (at 15 kV YAG detector, option) Electron optics Electron gun Cold field emission electron source Acc. voltage 0.5 30 kV (variable at 0.1 kV/step) Magnification x 30 x 800,000 Objective aperture 4 opening, selec-table and alignable outside the vacuum (Heater built-in) Detectors Secondary electron detector (upper/lower/upper + lower),   (noise compensation using a beam monitor),   (signal control function) YAG BSE detector (optional) Transmitted electron detector (optional) Faraday cup (optional) Energy dispersive X-ray detector (optional) Specimen stage Type I Type II Traverse X: 0 50mm 0 110 mm Y: 0 50mm 0 110mm Z: 1.5 30mm 1.5 40 mm T: -5 +70 degrees -5 +70 degrees R: 360 degrees 360 degrees Drive: Manual (Motor drive for 3 axes as an optional) PC-controlled 5 axis motor drive Image display Operation/display PC/AT compatible, OS: Windows®* 18.1" Flat panel display Scan mode Normal, Split/dual mag./line scan, position set, spot, AAF, SAA, oblique Frame memory 640 x 480 pixels, 1,280 x 960 pixels, 2,560 x 1,920 pixels, 5,120 x 3,840 pixels Image processing Image processing software, image filing Software built-in Image file format BMP, TIFF, JPEG selectable Scan speed TV, slow (0.5 ~ 40 s/frame) for viewing Slow (40 ~ 320 s/frame) for recording Image processing Automatic image brightness & contrast, raster rotation, autofocus, auto-stigmation, averaging, frame integration, color display Auto data recording Film numbering, acc. voltage, micron bar with a scale, magnification, date, hours and working distance Electrical image shift ±12 µm (at W.D. = 8 mm) Vacuum system Fully automated pneumatic valve control Energy saving ECO mode lon pumps 3 sets TMP 1 set RP 1 set Note: * Windows® is a registered trademark of Microsoft Corp.,U.S.A.