Transmission Electron Microscope H-9500
RS-3000

 

The H-9000 300kV TEM has been meeting the rigerous demands of the scientific community for more than a decade by offering extraordinary stability and field proven performance and reliability.
The new H-9500 300kV TEM follows these standards of excellence.
This new, state of the art TEM, utilizes modern computer control and digital cameras to enhance user-friendliness.
The H-9500 is an indispensable tool for a broad range of applications, from semiconductors to materials science, allowing atomic resolution microscopy of a variety of materials.

Features
  1. Advanced digital user-friendly atomic resolution microscope
  2. Integrated computer control with digital cameras allows various image processing functions including recording and archiving.
  3. Hitachi's field proven high voltage technology allows for a quick automated startup of the entire system; at the touch of a button, a 300kV beam is obtained in under 5 minutes with specimen exchange possible in under 1 minute.
    This new design allows for high sample throughput, which is particularly useful for routine semiconductor applications.
  4. Standard 5-Axis Hiper stage. Hitachi's exceptionally stable TEM stage features automatic navigation and sample position trace capabilities utilizing a user friendly GUI.

System Feature
Resolution
0.10 nm (crystal lattice)
0.18 nm (point - point)
Accelerating voltage
300 kV
Magnifications
(on film)
Zoom Mode
x1000 x1,500,000
Selected area
x4,000 ~ x500,000
Low mag
x200x500
Electron gun
Emitter
LaB6 DC heating
Emitter exchange
Auto-gun-lifter
High voltage cable
Resistor cable
Illumination system
Lens system
4-stage lens system
Condenser aperture
Click-stop-aperture with 4 openings
Imaging system
Lens system
5-stage lens system
Objective aperture
Click-stop-aperture with 4 openings
Selected area aperture
Click-stop-aperture with 4 openings
Electron diffraction
Camera length
250 3,000 mm
Specimen chamber
Specimen stage
5-axis Hiper stage
Specimen size
3 mm dia. (grid)
Specimen position display
Auto-position recall
Sample position trace
Stage tilt
: ±15° or greater
: ±15° or greater
Anti-contaminator
Lens shroud type
Column baking
Mild baking function
Viewing chamber
Fluorescent screen
Main screen: 110 mm dia.
Optical binocular
Magnification:x: 7.5
Camera chamber
Field selector
Full/half exposure size selector
Film recording
25 exposures/magazine x 2 sets
Control system/GUI
Standard functions
OS: Windows®* Database, measurement,image processing
Digital CCD-camera
Camera coupling
Lens coupling
Pixels
1,024 x 1,024 pixels
A/D resolution
12 bits
Viewing magnification
About x15 greater (on LCD type 18)
than direct observation at the main
fluorescent screen
Vacuum system
Electron gun
Ion pump: 0.06 m3/s
Column
Turbomolecular pump: 0.34 m3/s
Viewing/camera chamber
Diffusion pump: 0.28 m3/s
Fore pump: 0.16 m3/min
*Windows® is a registered trademark of Microsoft Corp., U.S.A.

 

Utilities
Ambient temperature
15 25
Humidity
60% RH or lower
Power
Single phase AC 200V, 100A
Grounding
First grade grounding with resistance of 100 ohms or smaller
Cooling water
Closed water circulator with a capacity of 29,300 kJ/h or greater recommended.

 

Hitachi High-Technologies Canada, Inc.
89 Galaxy Blvd. Suite 14,
Toronto, Ontario, Canada, M9W 6A4
Tel: 416.675.5860 | Fax: 416.675.0061 | Email
Designed By: MOTIF DESIGN
Copyright © Hitachi High-Technologies Canada, Inc.